LASER INTERFEROMETER FOR THE INTERFEROMETRIC MEASURING OF LENGTH

PCT No. PCT/DE88/00069 Sec. 371 Date Sep. 29, 1988 Sec. 102(e) Date Sep. 29, 1988 PCT Filed Feb. 12, 1988 PCT Pub. No. WO88/06711 PCT Pub. Date Sep. 7, 1988.In a laser interferometer for interferometric linear measurement, a semiconductor laser (1) energizes a measuring interferometer (7) with which...

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Hauptverfasser:	HOEFLER, HEINRICH, BERGMANN, ECKHARD
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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