LASER INTERFEROMETER FOR THE INTERFEROMETRIC MEASURING OF LENGTH

PCT No. PCT/DE88/00069 Sec. 371 Date Sep. 29, 1988 Sec. 102(e) Date Sep. 29, 1988 PCT Filed Feb. 12, 1988 PCT Pub. No. WO88/06711 PCT Pub. Date Sep. 7, 1988.In a laser interferometer for interferometric linear measurement, a semiconductor laser (1) energizes a measuring interferometer (7) with which...

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Hauptverfasser:	HOEFLER, HEINRICH, BERGMANN, ECKHARD
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Zusammenfassung:	PCT No. PCT/DE88/00069 Sec. 371 Date Sep. 29, 1988 Sec. 102(e) Date Sep. 29, 1988 PCT Filed Feb. 12, 1988 PCT Pub. No. WO88/06711 PCT Pub. Date Sep. 7, 1988.In a laser interferometer for interferometric linear measurement, a semiconductor laser (1) energizes a measuring interferometer (7) with which there is coordinated a spatially directly adjacent reference interferometer (9). The output signal of the reference signal detector (22) of the reference interferometer (9) is used to effet in the event of changes in the refraction index of the medium occupying the reference section and the measuring section a frequency tuning of the semiconductor laser (1) in such a way that the wavelength acting as a length normal will be kept constant in the reference interferometer (9) and the measuring interferometer (7).