Method of manufacturing a planar optical component

Grooves are etched in a glass substrate, using a metallic mask, after which the substrate is coated with a layer of glass having a refractive index which is higher than that of the substrate, the groove being filled completely. Excess glass is removed, the metallic mask being used as a stop layer an...

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Hauptverfasser: SPIERINGS, GIJSBERTUS ADRIANUS CORNELUS MARIA, ANGENENT, JOHANNES HENDRIKUS, HEIJMAN, MARITZA GERARDA JOSEPHA
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Sprache:eng ; fre ; ger
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creator SPIERINGS, GIJSBERTUS ADRIANUS CORNELUS MARIA
ANGENENT, JOHANNES HENDRIKUS
HEIJMAN, MARITZA GERARDA JOSEPHA
description Grooves are etched in a glass substrate, using a metallic mask, after which the substrate is coated with a layer of glass having a refractive index which is higher than that of the substrate, the groove being filled completely. Excess glass is removed, the metallic mask being used as a stop layer and a protective layer being provided at the location of the filled grooves. Excess glass is removed at the location of the grooves by means of polishing so that a high accuracy as regards depth can be obtained.
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language eng ; fre ; ger
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subjects CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMISTRY
GLASS
JOINING GLASS TO GLASS OR OTHER MATERIALS
METALLURGY
MINERAL OR SLAG WOOL
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
title Method of manufacturing a planar optical component
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