Method of manufacturing a planar optical component

Grooves are etched in a glass substrate, using a metallic mask, after which the substrate is coated with a layer of glass having a refractive index which is higher than that of the substrate, the groove being filled completely. Excess glass is removed, the metallic mask being used as a stop layer an...

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Bibliographische Detailangaben
Hauptverfasser:	SPIERINGS, GIJSBERTUS ADRIANUS CORNELUS MARIA, ANGENENT, JOHANNES HENDRIKUS, HEIJMAN, MARITZA GERARDA JOSEPHA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:	Grooves are etched in a glass substrate, using a metallic mask, after which the substrate is coated with a layer of glass having a refractive index which is higher than that of the substrate, the groove being filled completely. Excess glass is removed, the metallic mask being used as a stop layer and a protective layer being provided at the location of the filled grooves. Excess glass is removed at the location of the grooves by means of polishing so that a high accuracy as regards depth can be obtained.