MECHANICAL PROBE FOR THE OPTICAL MEASUREMENT OF ELECTRICAL POTENTIALS
The probe consists of a cubic electro-optical crystal (EO) constructed in the form of a point and a metallisation (GE) which is at earth potential and which covers the crystal (EO) with the exception of the surface areas directly opposite the measuring point, for example the conductor track (LB) of...
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Format: | Patent |
Sprache: | eng ; ger |
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Zusammenfassung: | The probe consists of a cubic electro-optical crystal (EO) constructed in the form of a point and a metallisation (GE) which is at earth potential and which covers the crystal (EO) with the exception of the surface areas directly opposite the measuring point, for example the conductor track (LB) of an integrated circuit (IC). Since the metallisation (GE) acting as counter electrode considerably facilitates the penetration of the stray electric field (SF) into the crystal point, geometry-dependent effects and influences of electrical microfields are almost completely suppressed. Using such a probe it is therefore possible to utilise, instead of the topography-dependent field contrast, the potential contrast for the optical measurement of electrical signals having a high temporal resolution. …… |
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