Electronic device having electrode and driving circuit substrate for display device

This application provides an electronic device using an oxide film of a molybdenum-tantalum alloy having a tantalum composition ratio of 50 to 97 atomic percent. According to this invention, the oxide film of the Mo-Ta alloy is higher in resistivity than the oxide film of Ta. Therefore, the TFT and MIM elements using the oxide film of the Mo-Ta alloy have a small leak electric current because of the high resistivity of the oxide film. And an anodic oxidation film of the Mo-Ta alloy of a better quality can be formed for a multi-layered insulating film.