HIGH VOLTAGE FEEDTHROUGH FOR ION PUMP

Ion pump (10) has feedthrough (33) for electrical connection to anode post (32) within the pumping chamber. Opening (36) in the pumping chamber wall receives a portion of insulator (42). The insulator (42) has a flange (48) which is of larger diameter than the opening (36) so that sputtered cathode...

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1. Verfasser: AMBOSS, KURT
Format: Patent
Sprache:eng
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Zusammenfassung:Ion pump (10) has feedthrough (33) for electrical connection to anode post (32) within the pumping chamber. Opening (36) in the pumping chamber wall receives a portion of insulator (42). The insulator (42) has a flange (48) which is of larger diameter than the opening (36) so that sputtered cathode material cannot directly disposit on the outer and upper surfaces of the flange (48).