METHOD AND MEANS FOR CO-SINTERING CERAMIC/METAL MLC SUBSTRATES

A method for co-sintering ceramic/metal multilayered ceramic substrates (15) wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction camber are substantially eliminated. Binder-burnoff is substantially not aggravated during this process as well. The process is accomplished by applying...

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Hauptverfasser: NUFER, ROBERT WOLFF, FLANAGAN, ARLYNE MARIE, KNICKERBOCKER, JOHN ULRICH, REDDY, SRINIVASA N, PERRY, CHARLES HAMPTON, HERRON, LESTER WYNN, FLAITZ, PHILIP LEE, HARVILCHUCK, JOSEPH MATTHEW
Format: Patent
Sprache:eng
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Zusammenfassung:A method for co-sintering ceramic/metal multilayered ceramic substrates (15) wherein X-Y shrinkage is controlled and X-Y distortion and Z-direction camber are substantially eliminated. Binder-burnoff is substantially not aggravated during this process as well. The process is accomplished by applying selective forces (12, 19) to the surfaces of the ceramic substrates to control lateral movement while allowing Z-direction shrinkage movement. Frictional force means, pneumatic force means and weights are among the means used to supply forces. Cerium oxide is used in certain embodiments to enhance binder-burnoff.