METHOD FOR PRODUCING MONOSILANE AND A TETRAALKOXYSILANE

A method for producing monosilane and a tetraalkoxysilane by disproportionation of an alkoxysilane, which comprises contacting an alkoxysilane having the formula:wherein R is lower alkyl group and n is an integer of 1 to 3, with a catalyst selected from the group consisting of a platinum group metal...

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Hauptverfasser: MISU, YOKO, IMAKI, NAOSHI, HAJI, JUNZO
Format: Patent
Sprache:eng
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Zusammenfassung:A method for producing monosilane and a tetraalkoxysilane by disproportionation of an alkoxysilane, which comprises contacting an alkoxysilane having the formula:wherein R is lower alkyl group and n is an integer of 1 to 3, with a catalyst selected from the group consisting of a platinum group metal, a compound of a platinum group metal, an anion exchange resin, alumina, silica alumina and zeolite containing a metal of Group la of the periodic table.