Thermal wave imaging

An electron energy beam (28) discontinuously scans a sample (32) and at each scan position produces a thermal wave in the sample, there being infrared radiation emitted from the thermal wave. All of the infrared radiation emitted from the heated areas of the sample is collected by an ellipsoidal col...

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Bibliographische Detailangaben
Hauptverfasser:	MELCHER, ROBERT LEE, DACOL, FRANK HUBERT, BAUMANN, THOMAS
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	An electron energy beam (28) discontinuously scans a sample (32) and at each scan position produces a thermal wave in the sample, there being infrared radiation emitted from the thermal wave. All of the infrared radiation emitted from the heated areas of the sample is collected by an ellipsoidal collector (34) and directed by reflection to an infrared detector (44), the sample and detector being at the foci of the collector (34), to give a two-dimensional image of the sample. A computer system (52) is used to control data acquisition, storage, processing and image display, and also modulation and scanning of the beam (28). Surface, on the surface, and sub-surface structure of the sample can be detected, for example to reveal defects, or surface particles.