SEMICONDUCTOR INTEGRATED CIRCUIT HAVING A BURIED RESISTOR

SEMICONDUCTOR INTEGRATED CIRCUIT HAVING A BURIED RESISTOR

A semiconductor integrated circuit includes a p-type well region (22) formed on an n-type semiconductor substrate (21). A hole extends from the surface of said p-type well region (22) to the substrate (21) and an intrinsic or lowly doped semiconductor (27) is buried through an insulating film (26) i...

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Bibliographische Detailangaben
Hauptverfasser: MINATO, OSAMU, MASUHARA, TOSHIAKI, YAMAMOTO, SYUUICHI, HANAMURA, SHOJI, SASAKI, TOSHIO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor integrated circuit includes a p-type well region (22) formed on an n-type semiconductor substrate (21). A hole extends from the surface of said p-type well region (22) to the substrate (21) and an intrinsic or lowly doped semiconductor (27) is buried through an insulating film (26) in said hole. This semiconductor (27) is used as a resistor.