Alignment apparatus for machines making integrated circuits

1. An alignment device for an apparatus for printing integrated circuits, comprising a reticle holding table (5) carrying a reticle and provided with means for moving it within its plane, at least along two mutually orthogonal directions x and y corresponding to two main axes of the reticle ; a tabl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TIGREAT, PAUL, BERGER, LAURENT, HIGNETTE, OLIVIER
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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