METHOD FOR PASSIVATING ALUMINUM-BASED METALLIZATIONS

Aluminium-based alloy films and metallization layers that are patterned by reactive ion etching (RIE) are passivated by etching surface portions of the films or layers with a phosphoric-chromic mixture to remove contaminants and then oxidizing the exposed surface portions in an oxygen atmosphere.

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Bibliographische Detailangaben
Hauptverfasser: ELDRIDGE, JEROME MICHAEL, SCHWARTZ, GERALDINE COGIN, LEE, MICHAEL HEIWO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Aluminium-based alloy films and metallization layers that are patterned by reactive ion etching (RIE) are passivated by etching surface portions of the films or layers with a phosphoric-chromic mixture to remove contaminants and then oxidizing the exposed surface portions in an oxygen atmosphere.