ELECTRON MICROSCOPE WITH SCANNING BEAM

1. A scanning electron microscope system for surface investigation of workpieces, comprising means to displace the point of impact of a primary electron beam directed towards that surface of an object which is to be investigated, means for keying the primary electron beam which triggers secondary electrons at the point of impact, and a secondary electron detector which generates an analysis signal, characterised by a sensor (SEN) supplied with the analysis signal (SI) and influencing a control system (EST) connected to the output of the sensor (SEN) and comprising a first circuit component (TA) to key the primary electron beam (PE) and a second circuit component (VE) to set and displace the point of impact (A) such that the point of impact (A) is displaced only following one or more interruptions in the primary electron beam (PE) as a result of the keying thereof, the duration of each interruption being controlled via the secondary electrons (SE) triggered at the point of impact (A) of the primary electron beam (PE).