PLASMA AND ION SOURCE

1. Plasma and ion source generating in a limited volume on the basis of the electron cyclotron resonance a plasma by means of a magnetic field, the irradiation of microwaves and the supply of the gas to be ionized, with the use of a permanent magnet (1) provided with an axial bore (2) into which bot...

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Bibliographische Detailangaben
Hauptverfasser:	BECHTHOLD, VOLKER, MOLLENBECK, JOSEF, PHYS, FRIEDRICH, LUDWIG, ZIEGLER, PETER
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	1. Plasma and ion source generating in a limited volume on the basis of the electron cyclotron resonance a plasma by means of a magnetic field, the irradiation of microwaves and the supply of the gas to be ionized, with the use of a permanent magnet (1) provided with an axial bore (2) into which both the microwaves (3) and the gas (4) can be introduced.