METHOD OF TESTING INTEGRATED CIRCUITS FOR THERMAL-FIELD STABILITY

The invention is related to the field of microelectronics and can be used for control of the wafer ionic contamination level in production of integrated circuits and semiconductor devices. The essence of the invention consists in provision of a method of testing integrated circuits for thermal-field...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OSIPOV Vladimir, Egorovich, EFIMENKO Sergey, Afanasievich, VASJKOV Valentin, Borisovich, KONDRATENKO Dmitry, Sergeevich, SOLODUKHA Vitaly, Alexandrovich, TURTSEVICH Arkady, Stepanovich
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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