FREMGANGSMÅDE TIL FREMSTILLING AF EN STRUKTUR VED BRUG AF STEP-AND-REPEAT-PRÆGETEKNIK

A method of manufacturing a structure that is capable of suppressing in-mask curing corrosion while minimizing influence on shape stability of a fine pattern to be transferred to a resin layer is provided. According to the present invention, a method of manufacturing a structure is provided that includes: lamination forming, forming a lamination including, on a transparent substrate, a resin layer of an imprinting photo curable resin composition containing a photopolymerizable monomer and 0.1 parts by mass or more respectively of a photo initiator and a polymerization inhibitor based on 100 parts by mass of the monomer; covering, pressing a fine pattern of a mold on the resin layer and covering the lamination with a shading mask to cause at least part of a region where the mold is pressed on in the resin layer to be an exposed region; curing the resin layer in the exposed region by radiating curing light to the resin layer; and repeating the covering and the curing one or more times by moving the mold to an uncured area in the resin layer.