Magnetosensitive current sensor with optical path, photo-detector and light source on carrier

A micro-electromechanical (MEMS) current sensing apparatus includes a carrier portion (306), an optical portion (301) disposed on the carrier portion (306), the optical portion (301) including an optical path (402, 403) and a magneto-sensitive element (401) within the optical path (402, 403), a ligh...

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Bibliographische Detailangaben
Hauptverfasser: KRAEMER, SEBASTIAN GERHARD MAXIM, HERNANDEZ, YARU MENDEZ
Format: Patent
Sprache:dan ; eng
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Beschreibung
Zusammenfassung:A micro-electromechanical (MEMS) current sensing apparatus includes a carrier portion (306), an optical portion (301) disposed on the carrier portion (306), the optical portion (301) including an optical path (402, 403) and a magneto-sensitive element (401) within the optical path (402, 403), a light source (302a) disposed on the earrier portion (306) in operative communication with a first end of the optical path (402), and a photo-deteetor (302b) disposed on the earrier portion (306) in operative communication with a second end of the optical path (403).