Nitridprodukter og fremgangsmåde og apparat til fremstilling af nitridprodukter
A method and apparatus are provided for producing a product comprising a nitride compound, such as for example silicon nitride. A reactor (10) is provided which has a chamber (12) defined therein which is divided into a combustion zone (12a) and a reaction zone (12b). A combustible mixture is inject...
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Zusammenfassung: | A method and apparatus are provided for producing a product comprising a nitride compound, such as for example silicon nitride. A reactor (10) is provided which has a chamber (12) defined therein which is divided into a combustion zone (12a) and a reaction zone (12b). A combustible mixture is injected (48a,b,c) into the combustion zone in a direction generally toward the reaction zone, and is accordingly combusted in the combustion zone. At least one reactant is injected (56) at the boundary between the zones into the reactor chamber in a direction generally parallel to the longitudinal axis (14) of the chamber (12) so as to react to form raw product comprising the nitride compound. According to another aspect, a raw product powder as produced by the reactor comprises silicon nitride as the nitride compound and further comprises elemental silicon. |
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