Vorrichtung und Verfahren für Oberflächeninspektionen

An optical element (25) is provided, thereby to move an optical axis of a scanning light (32) incident to a substrate (7) so that illumination positions to photodetecting faces of two photodetectors (9) agree or almost agree with each other. Respective surface information signals sent out from the t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NAKAJO, MASAHIRO, TATSUTA, KEN
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PRINTED CIRCUITS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An optical element (25) is provided, thereby to move an optical axis of a scanning light (32) incident to a substrate (7) so that illumination positions to photodetecting faces of two photodetectors (9) agree or almost agree with each other. Respective surface information signals sent out from the two photodetectors are accordingly agreed or a difference of the signals is minimized, whereby the measuring accuracy in surface inspection is improved.