ABSTANDSHALTER FÜR FELDEMISSIONSVORRICHTUNG

A field emission device (100, 200) includes an anode (190); a substrate (110); a plurality of spaced apart cathodes (120); a dielectric layer (124) disposed on the cathodes (120); a plurality of spacer pads (130, 230) disposed on the substrate (110) between adjacent cathodes (120) and including a sp...

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Bibliographische Detailangaben
Hauptverfasser: RUMBAUGH, ROB, LUCERO, RODOLFO, XIE, CHENGGANG, TRUJILLO, JOHANN, PACK, P
Format: Patent
Sprache:ger
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Zusammenfassung:A field emission device (100, 200) includes an anode (190); a substrate (110); a plurality of spaced apart cathodes (120); a dielectric layer (124) disposed on the cathodes (120); a plurality of spacer pads (130, 230) disposed on the substrate (110) between adjacent cathodes (120) and including a spacer contact layer (142, 185) that defines the surfaces of the spacer pads (130, 230); a spacer (150) having a first edge (157), a second edge (155), and a conductive layer (152) disposed on the second edge (155), the first edge (157) contacting the anode (190), the conductive layer (152) contacting the spacer contact layer (142, 185) at the spacer pads (130, 230); and an electron emitter (170) disposed within the dielectric layer (124) and spaced apart from the second edge (155) of the spacer (150).