Vakuumpumpe
The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plura...
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Zusammenfassung: | The invention concerns a vacuum pump (1) for achieving high vacuum conditions comprising a pump casing (5), a first plurality of molecular pumping stages (2) formed by rotor disks (8a,8b) cooperating with stator rings (9a,9b) and housed in a first portion (4a) of said pump casing, and a second plurality of pumping diaphragm stages (3) housed in a second portion (4b) of said pump casing, a first electric motor (13) for driving said rotor disks of the molecular stages, a second electric motor (30) for actuating the diaphragms (40) of the diaphragm stages, and at least a common passage (7) for the passage of the gas discharged from said molecular pumping stages (2) and sucked by said diaphragm pumping stages (3). |
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