Verfahren und Vorrichtung zur plasmachemischen Behandlung von Gasen

A plasma enhanced gas reactor including a reaction chamber having a pair of field-enhancing electrodes each of which has an axial passage through it by one of which a reactant gas is admitted to the reaction chamber, and by the other of which reaction products are removed from the reaction chamber.

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Bibliographische Detailangaben
Hauptverfasser: WINTERBOTTOM, FIONA, GILLESPIE, ROBERT FREW, HALL, STEPHEN IVOR, RAYBONE, DAVID
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:A plasma enhanced gas reactor including a reaction chamber having a pair of field-enhancing electrodes each of which has an axial passage through it by one of which a reactant gas is admitted to the reaction chamber, and by the other of which reaction products are removed from the reaction chamber.