Transparentes, leitfähiges Laminat und elektrolumineszentes Element
A transparent conductive laminate in which a transparent conductive layer (an ITO film) mainly comprising indium, tin and oxygen is formed on one main surface of a transparent substrate such as a polymeric film and which is excellent in moist heat resistance and scuff resistance and which can be app...
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Zusammenfassung: | A transparent conductive laminate in which a transparent conductive layer (an ITO film) mainly comprising indium, tin and oxygen is formed on one main surface of a transparent substrate such as a polymeric film and which is excellent in moist heat resistance and scuff resistance and which can be applied to various kinds of transparent electrodes. The transparent conductive layer has a stable amorphous structure, and its resistivity is 1x10 OMEGA .cm or less, and its electron mobility is 20 cm /(V.sec) or more. This transparent conductive laminate can be prepared by forming an amorphous film mainly comprising indium, tin and oxygen and having a resistivity of more than 1x10 OMEGA .cm on the substrate by a sputtering process under a high oxygen concentration atmosphere, and then subjecting the film to a heat treatment in the range of 80 to 180 DEG C to decrease the resistivity to 1x10 OMEGA .cm or less, while the amorphous structure is maintained. This transparent conductive laminate can suitably be utilized as the transparent electrode of an electroluminescence light-emitting element equipped with a layer containing zinc sulfide as a light-emitting layer, and in this case, the deterioration of luminance during continuous light emission can be remarkably inhibited. |
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