ELLIPSOMETER MIT HOHER RÄUMLICHER AUFLÖSUNG

PCT No. PCT/FR96/01035 Sec. 371 Date Jan. 27, 1998 Sec. 102(e) Date Jan. 27, 1998 PCT Filed Jul. 3, 1996 PCT Pub. No. WO97/07392 PCT Pub. Date Feb. 27, 1997The ellipsometry device includes a first focusing device, combined with a first optical system, for focusing the light beam from the first optical system onto the sample, a second focusing device, combined with a second optical system, for focusing the beam reflected by the sample surface onto the input of the second optical system, and an optical correction device for correcting, together with the first and second focusing devices, the position of the focused reflected beam so as to reject the interference reflections generated by the surface of the sample opposite the light beam receiving surface, and to obtain a maximum signal level at the photodetector.