Optisches Gerät zur Detektion einer Verschiebung

An apparatus for detecting the displacement information of an object to be measured has a light source, an electro-optical crystal disposed at the incidence position of a light beam from the light source, the light beam being modulated in the electro-optical crystal, the light beam being internally...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKAMIYA, MAKOTO, KADOWAKI, HIDEJIRO
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:An apparatus for detecting the displacement information of an object to be measured has a light source, an electro-optical crystal disposed at the incidence position of a light beam from the light source, the light beam being modulated in the electro-optical crystal, the light beam being internally reflected at least once in the electro-optical crystal and emerging therefrom, and a light receiving element for receiving the light from the object to be measured to which the light beam having emerged from the electro-optical crystal is applied, the displacement information of the object to be measured being detected by the light reception of the light receiving element.