Verfahren und Vorrichtung zur Herstellung von ultrahochreinem Stickstoff

An ultra-high purity nitrogen generating method comprises: feeding feed air to a carbon dioxide eliminator-drier (4) and a primary rectification column (6), thereby removing catalyst poisons for an oxidation catalyst used for oxidation of carbon monoxide and hydrogen in the feed air by means of the...

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Hauptverfasser: NAGAMURA, TAKASHI, HARIMA FACTORY OF TEISAN K.K., KAKO-GUN, HYOGO-KEN, JP, TOMITA, SHINJI, HARIMA FACTORY OF TEISAN K.K., KAKO-GUN, HYOGO-KEN, JP, YAMAMOTO, TAKAO, HARIMA FACTORY OF TEISAN K.K, KAKO-GUN, HYOGO-KEN, JP
Format: Patent
Sprache:ger
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Zusammenfassung:An ultra-high purity nitrogen generating method comprises: feeding feed air to a carbon dioxide eliminator-drier (4) and a primary rectification column (6), thereby removing catalyst poisons for an oxidation catalyst used for oxidation of carbon monoxide and hydrogen in the feed air by means of the carbon dioxide eliminator-drier (4) and the primary rectification column (6), condensing and liquefying a part of low purity nitrogen gas separated in the primary rectification column (6) by means of a condenser (7), warming the raw nitrogen gas which has not been condensed and liquefied in the condenser to normal temperature by means of a heat exchanger (5) and compressing it by a recycle compressor (9) so that the pressure thereof is increased and the temperature thereof is raised, oxidizing carbon monoxide and hydrogen in an oxidation column (10) and removing the resulting carbon dioxide and water by an adsorption column (12).