Seitwärts empfindlicher Beschleunigungsmesser sowie Verfahren zu seiner Herstellung

Seitwärts empfindlicher Beschleunigungsmesser sowie Verfahren zu seiner Herstellung

A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUTTERIDGE, RONALD J., PARADISE VALLEY, ARIZONA 85253, US, BENNET, PAUL T., PHOENIX, ARIZONA 85018, US, RISTIC, LJUBISA, PARADISE VALLEY, ARIZONA 85253, US, MIETUS, DAVID F., PHOENIX, ARIZONA 85044, US, KOURY, DANIEL N., JR., TEMPE, ARIZONA 85281, US
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (18) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16).