Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung
Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution an...
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| creator | YAMADA, MOTOYUKI, KAWASAKI-SHI, KANAGAWA-KEN, JP FURIHATA, TOMOYOSHI, KAWASAKI-SHI, KANAGAWA-KEN, JP WATANABE, OSAMU, JOUETSU-SHI, NIIGATA-KEN, JP YAGIHASHI, FUJIO, NO. 101, AOBADAI APT., YOKOHAMA-SHI, KANAGAWA-KEN, JP NAKANISHI, TOHRU, KAWASAKI-SHI, KANAGAWA-KEN, JP |
| description | Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers. |
| format | Patent |
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The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | ger |
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| subjects | CHEMISTRY COMPOSITIONS BASED THEREON MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-UP |
| title | Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung |
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