Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung

Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution an...

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Bibliographische Detailangaben
Hauptverfasser:	YAMADA, MOTOYUKI, KAWASAKI-SHI, KANAGAWA-KEN, JP, FURIHATA, TOMOYOSHI, KAWASAKI-SHI, KANAGAWA-KEN, JP, WATANABE, OSAMU, JOUETSU-SHI, NIIGATA-KEN, JP, YAGIHASHI, FUJIO, NO. 101, AOBADAI APT., YOKOHAMA-SHI, KANAGAWA-KEN, JP, NAKANISHI, TOHRU, KAWASAKI-SHI, KANAGAWA-KEN, JP
Format:	Patent
Sprache:	ger
Schlagworte:	CHEMISTRY COMPOSITIONS BASED THEREON MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers.