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A pressure measuring apparatus comprising a seal diaphragm that separates a fluid to be measured from a pressure transmitting medium that transmits a pressure variation of the fluid to be measured to a pressure detecting section. In such an apparatus, a non-electrically conductive film is coated on...

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Bibliographische Detailangaben
Hauptverfasser: SAITOH, MASAO, KAWASAKI-KU, KAWASAKI-SHI, KANAGAWA, JP, YAO, HIRONOBU, KAWASAKI-KU, KAWASAKI-SHI, KANAGAWA, JP, TAMAI, MITSURU, KAWASAKI-KU, KAWASAKI-SHI, KANAGAWA, JP
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:A pressure measuring apparatus comprising a seal diaphragm that separates a fluid to be measured from a pressure transmitting medium that transmits a pressure variation of the fluid to be measured to a pressure detecting section. In such an apparatus, a non-electrically conductive film is coated on a surface of the seal diaphragm which is on the side of the fluid to be measured. As a result of the above construction, the pressure can be measured accurately over a long period of time while preventing hydrogen from passing through the seal diaphragm surely and protecting the seal diaphragm.