Einrichtung zur Kalibrierung eines Durchflusssteuereinrichtung

An apparatus for translating a mass flow meter signal is connected to a mass flow meter of a mass flow controller and to a host process control system and includes a microcontroller which receives flow controller command calibration signal data from a calibration signal to which it may be temporaril...

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Bibliographische Detailangaben
Hauptverfasser: DOYLE, JAMES, HOLOHAN, ORANGE, CA 92667, US, DONALDSON, RICHARD, LEE, FOUNTAIN VALLEY, CA 92708, US, UPCHURCH, MICHAEL, DEAN, CORONA, CA 91720, US
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:An apparatus for translating a mass flow meter signal is connected to a mass flow meter of a mass flow controller and to a host process control system and includes a microcontroller which receives flow controller command calibration signal data from a calibration signal to which it may be temporarily connected. The microcontroller also includes a routine for storing the flow controller command calibration signal data in a nonvolatile or EPROM memory. An analog to digital converter of the microcontroller receives a linear flow controller analog command signal from a process host controller. In response thereto the microcontroller produces an analog mass flow rate command correction signal which is responsive to the stored flow controller command calibration signal data. The analog mass flow rate command correction signal is added to the command signal to produce a translated or corrected mass flow rate command signal. The amplifier supplies the corrected flow command signal to the mass flow controller.