Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren

Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren

An apparatus for producing a single crystal grown by Czochralski method includes a winding drum (64) disposed in a case (24) for winding up and down a flexible pull wire (20), a power transmission mechanism (M2, 46 - 56) for driving the winding drum (64), and a bearing unit (60) for rotatably suppor...

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Bibliographische Detailangaben
Hauptverfasser: YAMADA, FUMIO, USUI-GUN GUNMA-KEN, JP, OHARA, TOORU, GUNMA-KEN, JP, MASHIMO, MASAHIRO, GUNMA-KEN, JP, NAKAMURA, YASUSHI, TOMIOKA-SHI, GUNMA-KEN, JP, SHIOZAWA, ATSUSHI, NISHISHIRAKAWA-GUN, FUKUSHIMA-KEN, JP, OHTSUKA, SEIICHIRO, TOMIOKA-SHI, GUNMA-KEN, JP, NAMIKI, EIZI, GUNMA-KEN, JP, ODA, MICHIAKI, ANNAKA-SHI, GUNMA-KEN, JP, MIZUISHI, KOJI, ANNAKA-SHI, GUNMA-KEN, JP
Format: Patent
Sprache:ger
Schlagworte:
AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:An apparatus for producing a single crystal grown by Czochralski method includes a winding drum (64) disposed in a case (24) for winding up and down a flexible pull wire (20), a power transmission mechanism (M2, 46 - 56) for driving the winding drum (64), and a bearing unit (60) for rotatably supporting the winding drum (64). The power transmission mechanism (M2, 46 - 56) and the bearing unit (60) are disposed outside the case (24) and isolated from the furnace atmosphere surrounding the winding drum (64) and the pull wire (20) in the case (24). With this construction, metallic dust produced by abrasion from the power transmission mechanism (M2, 46 - 56) and the bearing unit (60) has no influence on the condition of the furnace atmosphere and hence the quality of a single crystal being pulled upwardly by the pull wire (20).