Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat

Methode zur Herstellung eines Mikroresonators mit ultrahoher Güte aus Quarzglas auf Siliziumsubstrat

A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surf...

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Bibliographische Detailangaben
Hauptverfasser: ARMANI, DENIZ K, SPILLANE, SEAN M, VAHALA, KERRY J, KIPPENBERG, TOBIAS J
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.