Zusammensetzungen für die Herstellung von Materialien niedriger Dielektrizitätskonstante

Mixtures for preparing materials with a low dielectric constant and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present inve...

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Hauptverfasser: DEVENNEY, MARTIN, CHONDROUDIS, KONSTANTINOS, PETERSON, BRIAN KEITH, CAMPBELL, KEITH DOUGLAS, RAMBERG, C. ERIC, DEIS, DEIS THOMAS ALLEN, WEIGEL, SCOTT JEFFREY, MACDOUGALL, JAMES EDWARD, BRAYMER, THOMAS ALBERT, CENDAK, KEITH, KIRNER, JOHN FRANCIS
Format: Patent
Sprache:ger
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Zusammenfassung:Mixtures for preparing materials with a low dielectric constant and films comprising same have been identified for improved performance when used as performance materials, for example, in interlevel dielectrics integrated circuits as well as methods for making same. In one aspect of the present invention, the performance of the dielectric material may be improved by controlling the weight percentage of ethylene oxide groups in the at least one porogen.