ROBOTER MIT UNABHÄNGIGER BEWEGUNG DER GREIFVORRICHTUNG

A substrate handling system comprises a robot containing mico-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage. Each of the linkages is independently actuatable using an associated moto...

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Bibliographische Detailangaben
Hauptverfasser:	GENOV, MILA, SOTIROV, ZLATKO, TODOROV, ALEXANDER
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate handling system comprises a robot containing mico-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage. Each of the linkages is independently actuatable using an associated motor, with the extensible linkage serving to convey the end effector linkage to the vicinity of a target processing station for delivery or retrieval of a substrate. Motion of the linkages may be synchronized to reduce travel time, and multiple end effectors may be mounted to the extensible linkage for increasing throughput.