Orientation layer construction for liquid crystal displays

A pallet (13) and substrate (14) are suspended in front of two rectangular targets (11,12) in a rectangular vacuum chamber (10) and moved past in the direction of the arrow (15). The target cathode (11) opposite the substrate (14) is inclined at an angle to the surface of the substrate (14). A plasm...

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Bibliographische Detailangaben
Hauptverfasser:	KALLFAS, TRAUGOTT.., 71723 GROSBOTTWAR, DE, BUERKLE, ROLAND., 70197 STUTTGART, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A pallet (13) and substrate (14) are suspended in front of two rectangular targets (11,12) in a rectangular vacuum chamber (10) and moved past in the direction of the arrow (15). The target cathode (11) opposite the substrate (14) is inclined at an angle to the surface of the substrate (14). A plasma (16) forms before the target cathode (11) and particles are directed through the opening onto the surface of the substrate (14) in the direction of the arrow (17). The sides of the target (11) are screened to avoid formation of a plasma. An external, homogeneous orientation layer is sputtered over the whole substrate area with regular distribution directional anisotropy.