Verfahren zur Herstellung eines mehrschichtigen keramischen Elektronikbauteils
PURPOSE:To enhance the smoothness of an edge which faces a gap area at the tip of an internal electrode by melting and removing an area and its surrounding area which is electrochemically etched and exposes the internal electrode and filling an insulation material into the melted and removed area an...
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Zusammenfassung: | PURPOSE:To enhance the smoothness of an edge which faces a gap area at the tip of an internal electrode by melting and removing an area and its surrounding area which is electrochemically etched and exposes the internal electrode and filling an insulation material into the melted and removed area and forming each external electrodes on a pair of opposed surfaces of a layer. CONSTITUTION:In terms of a sintered substance 1, a plurality of internal electrodes 2 to 7 are laid out in such a fashion that they may be placed one upon another in the thickness direction by way of a ceramic layer. The internal electrodes are formed based on a vapor deposition method. Then, a common electrode 8 is formed so that it may cover an end face 1a of the sintered substance 1. Then, it is electrochemically etched so as to melt and remove an area and its surrounding area which is exposed on a side 1b of the internal electrodes 2, 4 and 6 which are electrically connected to the common electrode 8, thereby forming a void A between the internal electrodes 2, 4 and 6 and the side 1b. Then, the void A is filled up with Pb-Si-Al group glass dust-sized particles as an insulation material. Then, a common electrode 18 is formed on the side 1b of the sintered substance 1. |
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