Anordnung zum Erwärmen einer Bondstelle beim Goldraht-Thermosonic-Wirebonden

Arrangement for heating a bonding point (4) in the case of gold-wire thermosonic wire bonds by means of a laser beam (7) which comes from a laser and is guided by way of a waveguide (6), characterised by a standard bonding device (1) having a conventional capillary tube (3), by a focusing lens (5) w...

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Hauptverfasser: HAGEN, ROBERT., 93092 BARBING, DE, BINNER, RALPH., 01109 DRESDEN, DE
Format: Patent
Sprache:ger
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Zusammenfassung:Arrangement for heating a bonding point (4) in the case of gold-wire thermosonic wire bonds by means of a laser beam (7) which comes from a laser and is guided by way of a waveguide (6), characterised by a standard bonding device (1) having a conventional capillary tube (3), by a focusing lens (5) which is arranged on the bonding head (2) of the bonding device (1), and by a highly flexible waveguide (6) which is connected to the laser and the focusing lens (5).