Excimer radiation generating lamp - has high pressure halogen filling, useful for UV treatment of coatings

(A) An electrode-less lamp bulb consists of an envelope, which has no internal or external electrodes and which is transparent to UV radiation, and an envelope filling contg. a halogen in amount to give a halogen pressure of more than 350 Torr at the operating temp. (B) A microwave-powered excimer l...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DOLAN, JAMES T., FREDERICK, MD., US, TURNER, BRIAN, MYERSVILL, MD., US
Format: Patent
Sprache:eng ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:(A) An electrode-less lamp bulb consists of an envelope, which has no internal or external electrodes and which is transparent to UV radiation, and an envelope filling contg. a halogen in amount to give a halogen pressure of more than 350 Torr at the operating temp. (B) A microwave-powered excimer lamp has a microwave energy supply, a device for coupling microwave energy to excite an envelope filling, a grid system for blocking microwave energy during radiation emission from the lamp and one of (i) a filled lamp enevlope as described above; (ii) an envelope having a filling contg. a halogen and a noble gas, the filling pressure being more than 2.5 atmos. at the operating temp,; (iii) an envelope with a halogen filling of more than 350 Torr pressure at the operating temp; or (iv) an envelope with a filling of a noble gas and a halogen, the halogen pressure being more than 350 Torr at the operating temp. (C) An electrically powered excimer lamp having an UV transparent envelope, with a filling contg. a halogen at more than 350 Torr pressure at the operating temp., and a system for coupling electrical energy with the envelope to excite the filling. USE/ADVANTAGE - The lamps are excimer lamps useful for UV treatment of photo-treatable coatings, e.g. on flat or curved substrates (e.g. cans) or in photolithography for IC mfr. They produce UV radiation concentrated in the 250-300nm range with increased efficiency (e.g. 14.6%).