Robotic semiconductor wafer transporter with vertical photodetector array - scans detectors to determine which slots are occupied by wafers illuminated from emitter on robot arm

A light-emitting device (28) on the robot arm (16) is coupled to the array (300) of individually addressable photodetectors for checking the positions of wafers (201) in respective slots of a cassette. The robot has two wafer grippers (27) for cylindrical movement. The light emitters illuminate the...

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Bibliographische Detailangaben
Hauptverfasser:	KOEHLER, PAUL K, SWERNOFSKY, DAVID E., SILVER SPRING, MD., US, WALKER, DELROY O., HYATTSVILLE, MD., US, WOOTEN, ROBERT D., ROCKVILLE, MD., US, MATTHEWS, JOHN C., GAITHERSBURG, MD., US
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A light-emitting device (28) on the robot arm (16) is coupled to the array (300) of individually addressable photodetectors for checking the positions of wafers (201) in respective slots of a cassette. The robot has two wafer grippers (27) for cylindrical movement. The light emitters illuminate the photodetectors through a wafer boat (200) which is moved from a loading position to one within range of the robot. USE/ADVANTAGE - In integrated circuit mfr., setting time of processing machine is optimised so that another wafer can be supplied to it as soon as previous one has been removed.