Manufacture of controlled field emitter for flat display screen, TV etc. - using successive etching and deposition stages to form cone shaped emitter peak set in insulating matrix together with electrodes

Manufacture of controlled field emitter for flat display screen, TV etc. - using successive etching and deposition stages to form cone shaped emitter peak set in insulating matrix together with electrodes

A controlled field emitter of micrometre dimensions is formed from a matrix of isolating material (1) which initially has a latent particle track on the centreline. In a first stage, a cone shaped aperture is etched on the underside and this filled (6) by deposition of metallic material to form the...

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Bibliographische Detailangaben
Hauptverfasser: BIETH, CLAUDE, MONTS EN BESSIN, FR, ANGERT, NORBERT, 6108 WEITERSTADT, DE, BASSIERE, JEAN CLAUDE, LE SAPPEY EN CHARTREUSE, FR, SPOHR, REIMAR., 6100 DARMSTADT, DE, TRAUTMANN, CHRISTINE, 6100 DARMSTADT, DE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A controlled field emitter of micrometre dimensions is formed from a matrix of isolating material (1) which initially has a latent particle track on the centreline. In a first stage, a cone shaped aperture is etched on the underside and this filled (6) by deposition of metallic material to form the emitter tip. A cone shaped aperture is etched on the topside and a metal layer deposited with a circular opening. The layer acts a control electrode for the device. This is covered by an anode layer (12). ADVANTAGE - Structuring mask is no longer required.