Three=dimensional micro-magnetic field detection system - has output of scanning electron microscope received by diode array

The micromagnetic field generated by an object is detected by a scanning electron beam microscope and the deflected electron beam is directed onto the surface of a diode arrangement (20) that provides read out. The diode unit is mounted in the base of the microscope housing. The diode unit has a num...

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Bibliographische Detailangaben

Hauptverfasser:	KUBALEK, ERICH, DR., 5100 AACHEN, DE, STECK, MATTHIAS, 4100 DUISBURG, DE, SCHEWE, HERBERT., 8522 HERZOGENAURACH, DE, BALK, LUDWIG JOSEF., 4154 TOENISVORST, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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