Three=dimensional micro-magnetic field detection system - has output of scanning electron microscope received by diode array

Three=dimensional micro-magnetic field detection system - has output of scanning electron microscope received by diode array

The micromagnetic field generated by an object is detected by a scanning electron beam microscope and the deflected electron beam is directed onto the surface of a diode arrangement (20) that provides read out. The diode unit is mounted in the base of the microscope housing. The diode unit has a num...

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Bibliographische Detailangaben
Hauptverfasser: KUBALEK, ERICH, DR., 5100 AACHEN, DE, STECK, MATTHIAS, 4100 DUISBURG, DE, SCHEWE, HERBERT., 8522 HERZOGENAURACH, DE, BALK, LUDWIG JOSEF., 4154 TOENISVORST, DE
Format: Patent
Sprache:eng ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The micromagnetic field generated by an object is detected by a scanning electron beam microscope and the deflected electron beam is directed onto the surface of a diode arrangement (20) that provides read out. The diode unit is mounted in the base of the microscope housing. The diode unit has a number of diode arrays formed in which there is an 'n' type substrate (21), with zones (22) formed in strips. Transfer zones (23) are formed at the boundaries, with inset electrodes (24) generating the outputs. ADVANTAGE - Accurate measurement of micromagnetic fields.