System und Verfahren zur Ermittlung des Zentrums eines integrierten Schaltungsplättchens

A system and method for determining the precise location of a moving object such as a semiconductor wafer (15) relative to a destination position, using an array of optical sensors (61-63) positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points a...

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Bibliographische Detailangaben
Hauptverfasser:	CHENG, DAVID, SAN JOSE CALIFORNIA 95218, US, ZHANG, WESLEY W., BURLINGAMA CALIFORNIA 94010, US
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS REGULATING SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A system and method for determining the precise location of a moving object such as a semiconductor wafer (15) relative to a destination position, using an array of optical sensors (61-63) positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used by a system computer (25) to calculate the center position of the wafer relative to the destination position.