Hollow cathode of a plasma electron and ion source

The hollow cathode of a plasma electron and ion source has a housing (2) having an exit opening (7) and a bottom (3) in which a gas feed opening (4) is constructed and which bounds the inner space of the housing (2) on one side. The cylindrically shaped inner space of the housing (2) is bounded on t...

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Bibliographische Detailangaben
Hauptverfasser:	KUPREEV, VLADIMIR PETROVIC, GRACEV, KONSTANTIN ANDREEVIC, GAVRINCEV, SERGEJ VASIL'EVIC, SARATOV, SU, BELJUK, SERGEJ IVANOVIC, GRUZDEV, VLADIMIR ALEKSEEVIC, TOMSK, SU, SAVCUK, VLADIMIR PETROVIC, RZEV, SU
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	The hollow cathode of a plasma electron and ion source has a housing (2) having an exit opening (7) and a bottom (3) in which a gas feed opening (4) is constructed and which bounds the inner space of the housing (2) on one side. The cylindrically shaped inner space of the housing (2) is bounded on the other side by a wall of the housing (2) in which the exit opening (7) is constructed. In the inner space of the housing (2) a diaphragm (6), electrically insulated from the housing (2), is arranged at a distance (l2) from the bottom (3) of the housing (2) which is equal to two thirds of the length (l1) of the inner space. The thickness (h) of the diaphragm (6) and the diameter (D2) of the opening therein are between 0.3 and 0.4 of the diameter (D1) of the cylindrically-shaped inner space.