Process for preparing germanium tetrafluoride
A process is provided in which germanium tetrafluoride is produced by reaction of germanium dioxide with, in particular, depleted uranium hexafluoride in the presence of a strong mineral acid, preferably concentrated sulphuric acid. A highly pure product is obtained which is most suitable for the pr...
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| Format: | Patent |
| Sprache: | eng ; ger |
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| Zusammenfassung: | A process is provided in which germanium tetrafluoride is produced by reaction of germanium dioxide with, in particular, depleted uranium hexafluoride in the presence of a strong mineral acid, preferably concentrated sulphuric acid. A highly pure product is obtained which is most suitable for the production of germanium-containing semiconductors and alloys for the electronics industry. |
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