POSITIV ARBEITENDES STRAHLUNGSEMPFINDLICHES GEMISCH UND DARAUS HERGESTELLTES STRAHLUNGSEMPFINDLICHES AUFZEICHNUNGSMATERIAL
A proposed positive-working radiation-sensitive composition contains a compound which forms an acid when exposed to actinic radiation and a compound which is acid-cleavable and is characterised in that the acid-cleavable compound is monomeric and contains an acetal group whose aldehyde or ketone com...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A proposed positive-working radiation-sensitive composition contains a compound which forms an acid when exposed to actinic radiation and a compound which is acid-cleavable and is characterised in that the acid-cleavable compound is monomeric and contains an acetal group whose aldehyde or ketone component has a development solubility of 0.1 to 100 g/l and a boiling point of over 150 DEG C.
The claimed composition does not exhibit varying development properties even with varying "holding times" and therefore has a large processing latitude and makes possible a high structural resolution. |
---|