POSITIV ARBEITENDES STRAHLUNGSEMPFINDLICHES GEMISCH UND DARAUS HERGESTELLTES STRAHLUNGSEMPFINDLICHES AUFZEICHNUNGSMATERIAL

A proposed positive-working radiation-sensitive composition contains a compound which forms an acid when exposed to actinic radiation and a compound which is acid-cleavable and is characterised in that the acid-cleavable compound is monomeric and contains an acetal group whose aldehyde or ketone com...

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1. Verfasser: DOESSEL,KARL-FRIEDRICH,.DR
Format: Patent
Sprache:ger
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Zusammenfassung:A proposed positive-working radiation-sensitive composition contains a compound which forms an acid when exposed to actinic radiation and a compound which is acid-cleavable and is characterised in that the acid-cleavable compound is monomeric and contains an acetal group whose aldehyde or ketone component has a development solubility of 0.1 to 100 g/l and a boiling point of over 150 DEG C. The claimed composition does not exhibit varying development properties even with varying "holding times" and therefore has a large processing latitude and makes possible a high structural resolution.