Apparatus for machining a workpiece by means of a laser beam

In an apparatus for machining a workpiece (6) by means of a laser beam (2), comprising a laser (1), a deflection mirror (3) with which the laser beam (2) produced by the laser (1) is directed via focussing optics (5) onto the surface of the workpiece (6), and an observation device for observing the...

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Bibliographische Detailangaben
Hauptverfasser: RUGE,JUERGEN,DR, HANSMANN,MATTHIAS, DECKER,INGO,.DR
Format: Patent
Sprache:eng ; ger
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Zusammenfassung:In an apparatus for machining a workpiece (6) by means of a laser beam (2), comprising a laser (1), a deflection mirror (3) with which the laser beam (2) produced by the laser (1) is directed via focussing optics (5) onto the surface of the workpiece (6), and an observation device for observing the machining operation at the workpiece (6), continuous process control can be carried out owing to the fact that the deflection mirror (3) is partially permeable and that an optoelectronic sensor (10) connected to an analysing device (12) is arranged on its rear side in extension of the direction of the laser beam (2) between deflection mirror (3) and workpiece (6).