Heating apparatus for vacuum installations and method for its operation
Heating apparatus for vacuum installations, having heating pipes which are heated by means of a glow wire and supported by mountings and the outer shell of which consists of a highly heat-resistant metallic or ceramic, high-purity material, such as in particular titanium, tantalum, tungsten, niobium...
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Format: | Patent |
Sprache: | eng ; ger |
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Zusammenfassung: | Heating apparatus for vacuum installations, having heating pipes which are heated by means of a glow wire and supported by mountings and the outer shell of which consists of a highly heat-resistant metallic or ceramic, high-purity material, such as in particular titanium, tantalum, tungsten, niobium or the like, or of non-porous aluminium oxide, or alternatively of quartz, and the mountings for suspending the heating pipes consist of a non-porous ceramic material, such as in particular aluminium oxide. |
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